Anti-reflection plate and method for manufacturing the anti-reflection structure thereof

A method for manufacturing anti-reflection structure includes the following steps. First, a to-be-treated object is provided in a reactive area. Then, a plasma source is provided in the reactive area. Afterwards, the plasma source is ionized to form plasma in atmospheric pressure. Then, the surface...

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Bibliographische Detailangaben
Hauptverfasser:	HSIEH, WEN-TZONG, HSU, WEN-TUNG, LIN, CHUN-HUNG, WU, CHIN-JYI, CHEN, CHIH-WEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM METALLURGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TRANSPORTING
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Beschreibung
Zusammenfassung:	A method for manufacturing anti-reflection structure includes the following steps. First, a to-be-treated object is provided in a reactive area. Then, a plasma source is provided in the reactive area. Afterwards, the plasma source is ionized to form plasma in atmospheric pressure. Then, the surface of the to-be-treated object is treated by plasma so as to form a plurality of micro-protuberances.