Transfer robot for spinner system, transport hand thereof and vacuum supply apparatus thereof

The present invention is used to reduce the amount of heat conducted from high temperature generated by a transport hand that is heated as moving in and out of a high temperature environment toward a wafer that is being conveyed by the transport hand so as to effectively preventing the wafer from ge...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	LEE, JUNE-HYEONG, RYU, JAI-MOON, KIM, CHANG-HYEON
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	The present invention is used to reduce the amount of heat conducted from high temperature generated by a transport hand that is heated as moving in and out of a high temperature environment toward a wafer that is being conveyed by the transport hand so as to effectively preventing the wafer from getting a high temperature due to being heated by the amount of heat conducted. The present invention provides a transfer robot for spinner system, a transport hand, and a vacuum supply apparatus that prevents any one of a plurality of transport hands from abrupt reduction of vacuum suction pressure even when the transport hands are each sucking and holding a wafer to thereby simultaneously consume vacuum.