Automatic defect inspection device for substrate laser repair and method thereof

This invention relates to an automatic defect inspection device for a substrate laser repair system. An electrical test is applied to a substrate. After the test result is obtained, a second image capture means of an automatic optical inspection module, instead of human eyes, is employed to capture...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	CHANG, CHUN-LUNG, HUNG, CHAO-YANG, JENG, JYH-JYE, LU, SHANGIEH
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MACHINE TOOLS MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS PHYSICS SOLDERING OR UNSOLDERING TESTING TRANSPORTING WELDING WORKING BY LASER BEAM
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	This invention relates to an automatic defect inspection device for a substrate laser repair system. An electrical test is applied to a substrate. After the test result is obtained, a second image capture means of an automatic optical inspection module, instead of human eyes, is employed to capture images of the defected gate/source line at high speed. By applying an inspection method of a laser repair module, the defects are then inspected to facilitate the subsequent laser repairing process.