Substrate transfer system

Provided is a substrate transfer system for transferring substrates between a substrate storing cassette and a processing apparatus. The substrate transfer system is provided with a first conveyer which transfers a plurality of substrates at the same time; a second conveyer which is continuously arr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GAMO, TORU, HORI, TAKEHIKO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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