Substrate transfer system

Provided is a substrate transfer system for transferring substrates between a substrate storing cassette and a processing apparatus. The substrate transfer system is provided with a first conveyer which transfers a plurality of substrates at the same time; a second conveyer which is continuously arr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	GAMO, TORU, HORI, TAKEHIKO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	Provided is a substrate transfer system for transferring substrates between a substrate storing cassette and a processing apparatus. The substrate transfer system is provided with a first conveyer which transfers a plurality of substrates at the same time; a second conveyer which is continuously arranged from the first conveyer and separately transfers the substrates in the transfer direction; a moving unit, which has a placing section for placing the substrate which is on the second conveyer, and moves the substrate in a direction orthogonally intersecting with the transfer direction on the second conveyer; and a lifting unit which relatively brings up and down the placing section and the second conveyer.