CMOS process compatible MEMS probe card

A probe card includes a CMOS chip and a print circuit board. The said CMOS chip based on the standard CMOS-MEMS process is characterized by integrating a probe head with a space transformer. Because of having characteristic of fine pitch and high density, it could be served as a cantilever or a vert...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHAO, PEN-SHAN, LEE, KUO-YU, HUANG, JUNG-TANG, HSU, HOU-JUN, WU, CHAN-SHOUE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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