Apparatus and method of generating map data for a probe tester

In an apparatus and a method of generating map data for a probe tester, the apparatus includes a data generation module for generating raw data of the wafer using a wafer information file including various characteristics of a sample wafer, an error detection module for inspecting a map error between first coordinates of the chip on the wafer and second coordinates of a map chip in the raw data corresponding to the chip, a calibration module for calculating a correction amount for compensating for the map error between the first coordinates of the chip and the second coordinates of the map chip, and a coordinate correction module for correcting the coordinates of the map chip in the raw data in accordance with the correction amount. Accordingly, accurate map data may be generated without any additional manual operation based on the raw data related to the wafer.