Vacuum supporting apparatus

Vacuum supporting apparatus

A vacuum supporting apparatus includes a vacuum chuck table, a pipeline, a vacuum tank, a water tank, and at least a valve. The vacuum chuck table has through holes, and the pipeline has three ends. The first end of the pipeline leads to the through holes, the second end leads to a pump, and the thi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIANG, SHWU-FEI, CHUANG, CHUEH-HAO, TSENG, CHIENUN, WANG, YUNGI
Format: Patent
Sprache:chi ; eng
Schlagworte:
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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Beschreibung
Zusammenfassung:A vacuum supporting apparatus includes a vacuum chuck table, a pipeline, a vacuum tank, a water tank, and at least a valve. The vacuum chuck table has through holes, and the pipeline has three ends. The first end of the pipeline leads to the through holes, the second end leads to a pump, and the third end leads to a DI water source. The vacuum tank is located between the first end and the second end, and the water tank is located between the first end and the third end. The vacuum tank or the water tank is open to the first end of the pipeline by the valve.