Laser treatment method

The present invention relates to a laser treatment method for cutting a brittle substrate. The method includes the steps of: forming a pre-cutting mark on the brittle substrate with a crazing device; heating the brittle substrate along the pre-cutting mark with a laser beam; cooling the heated britt...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HSU, TSUNG-FU, FU, CHEN-TSU, KUO, FANG SHIUAN, CHEN, HSIEN-TANG, HUANG, CHUN-KAI, CHANG, MING-HUI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The present invention relates to a laser treatment method for cutting a brittle substrate. The method includes the steps of: forming a pre-cutting mark on the brittle substrate with a crazing device; heating the brittle substrate along the pre-cutting mark with a laser beam; cooling the heated brittle substrate with a gas having a temperature below 0 DEG C, whereby the brittle substrate is splitted along the pre-cutting mark.