Laser treatment method
The present invention relates to a laser treatment method for cutting a brittle substrate. The method includes the steps of: forming a pre-cutting mark on the brittle substrate with a crazing device; heating the brittle substrate along the pre-cutting mark with a laser beam; cooling the heated britt...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The present invention relates to a laser treatment method for cutting a brittle substrate. The method includes the steps of: forming a pre-cutting mark on the brittle substrate with a crazing device; heating the brittle substrate along the pre-cutting mark with a laser beam; cooling the heated brittle substrate with a gas having a temperature below 0 DEG C, whereby the brittle substrate is splitted along the pre-cutting mark. |
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