Semiconductor piezoresistive sensor and operation method thereof

A semiconductor piezoresistive sensor, electrically connected with a circuit includes a semiconductor substrate, at least one piezoresistive element and a conductive layer. The semiconductor substrate includes a diaphram and a base. The base is disposed adjacent to and around the diaphram. The piezo...

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Bibliographische Detailangaben
Hauptverfasser:	SHING, TAI KANG, HSIEH, HSIEH-SHEN, LIANG, CHAO-JUI, LEE, CHENGANG, CHEN, HUANG-KUN, CHANG, HENGUNG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	A semiconductor piezoresistive sensor, electrically connected with a circuit includes a semiconductor substrate, at least one piezoresistive element and a conductive layer. The semiconductor substrate includes a diaphram and a base. The base is disposed adjacent to and around the diaphram. The piezoresistive element is disposed in the diaphram and is electrically connected with the circuit. The conductive layer is electrically connected with the diaphram.