Immersion type coating method and device

An immersion type coating method and device for coating a coating-liquid over a substrate, by adjusting a pump to adjust the air-flow being introduced into a container in order to control the rate of the coating-liquid is discharged from the container, thereby controlling the rate that the coating-...

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1. Verfasser: KU, TOM
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:An immersion type coating method and device for coating a coating-liquid over a substrate, by adjusting a pump to adjust the air-flow being introduced into a container in order to control the rate of the coating-liquid is discharged from the container, thereby controlling the rate that the coating- liquid in which the substrate is immersed separates from the liquid level of the coating-liquid to ensure optimum control of the coating thickness, wherein the air introduced into the container does not react with the coating-liquid to ensure optimum coating effect.