Filter of sputter

The invention relates a filter of a sputter. The filter comprises a housing. The housing has a through hole in the front end thereof. In the through hole, a filter panel, a filter layer of nonwoven fabric and an efficient filtering layer are mounted. A shutter and an upper cap are covered on the rea...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	LAI, CHING-HUA, CHEN, CHIOU-GUEI, LIU, CHUNGIUNG, HSU, TSUNGING, LIAO, HSUEHIUNG, YU, TUAN-JEN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The invention relates a filter of a sputter. The filter comprises a housing. The housing has a through hole in the front end thereof. In the through hole, a filter panel, a filter layer of nonwoven fabric and an efficient filtering layer are mounted. A shutter and an upper cap are covered on the rear side of the housing. The shutter has a runner hole thereon.