Lift pin module of flat panel display manufacturing apparatus

A lift pin module is disclosed. The lift pin modules includes lift pins closely contacting lift pin holes which are formed in a lower electrode such that it is prevented abnormal discharge caused by processing gas introduced into the lift pin holes during the process.

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Bibliographische Detailangaben
Hauptverfasser:	KIM, YOUNG-TAE, SON, HYOUNG-KYU, LEE, CHANG-KEUN, KIM, CHUN-SIK, HWANG, YOUNG JOO, LEE, YOUNG-JONG, KIM, HYUNG-SOO, IM, SANG-JUN, CHOI, JUN-YOUNG, LEE, SEOUNG-WOOK, YOON, BYUNG-OH, LEE, JEONG-BIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	A lift pin module is disclosed. The lift pin modules includes lift pins closely contacting lift pin holes which are formed in a lower electrode such that it is prevented abnormal discharge caused by processing gas introduced into the lift pin holes during the process.