$Building up diffractive optics by structured glass coating$

Building up diffractive optics by structured glass coating

The invention relates to optical parts, and in particular to a process for applying an optically active structuring to a substrate, and also to a component produced using a process of this type. The process for applying an optically active structuring to a substrate comprises in particular photolith...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HAMMERL, KLAUS MICHAEL, MUND, DIETRICH
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	The invention relates to optical parts, and in particular to a process for applying an optically active structuring to a substrate, and also to a component produced using a process of this type. The process for applying an optically active structuring to a substrate comprises in particular photolithographic techniques and the deposition of material via physical vapor deposition processes.