Dielectric element, piezoelectric element, ink jet head and method for producing the same head

To provide a dielectric layer of crystal structure preferentially or uniaxially oriented on a common substrate. A dielectric element of desired quality can be stably produced even on a common substrate for film-making by forming a lower electrode layer, dielectric layer and upper electrode layer in...

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Bibliographische Detailangaben
Hauptverfasser: TAKEDA, KENICHI, AOKI, KATSUMI, ASANO, GOJI, FUKUI, TETSURO, OKAMOTO, SHOJI, FUNAKUBO, HIROSHI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:To provide a dielectric layer of crystal structure preferentially or uniaxially oriented on a common substrate. A dielectric element of desired quality can be stably produced even on a common substrate for film-making by forming a lower electrode layer, dielectric layer and upper electrode layer in this order on a substrate, wherein each of these layers are designed to be preferentially or uniaxially oriented, and to have a specific half bandwidth, determined by fitting a pseudo-Voigt function.