Wet etching chemical mixing system
A wet etching chemical mixing system. The wet etching chemical mixing system comprises a tank, a first pipe, a second pipe a mixing sensor, a normal sensor and a controller. The first pipe has a first switch and links to the tank. The second pipe has a second switch and links to the tank. The mixing...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | A wet etching chemical mixing system. The wet etching chemical mixing system comprises a tank, a first pipe, a second pipe a mixing sensor, a normal sensor and a controller. The first pipe has a first switch and links to the tank. The second pipe has a second switch and links to the tank. The mixing sensor and the normal sensor are disposed in the tank. The controller links with the mixing sensor, the normal sensor, the first switch and the second switch. |
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