Method for detecting defectives in an integrated circuit

A method for detecting defectives in an integrated circuit that is composed of a plurality of transistors in parallel. The method includes the following steps: applying a bias to the plurality of transistors in parallel; and catching the infrared imagery of the plurality of transistors.

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Bibliographische Detailangaben
Hauptverfasser: SHIH, YINGOU, HU, CHENGI, HUANG, CHUNG-ER, WU, JANNE-WHA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A method for detecting defectives in an integrated circuit that is composed of a plurality of transistors in parallel. The method includes the following steps: applying a bias to the plurality of transistors in parallel; and catching the infrared imagery of the plurality of transistors.