METHOD OF TESTING SURFACE LAYER OF SEMICODUCTOR SINGLE CRYSTAL

Bibliographische Detailangaben

Hauptverfasser:	IMAMOV RAFIK M,SU, BOLDYREV VLADIMIR P,SU, BUJKO LEV D,SU, KON VIKTOR G,SU, KOVALCHUK MIKHAIL V,SU, AFANASEV ALEKSANDR M,SU, KOVEV ERNST K,SU, LOBANOVICH EDUARD F,SU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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