DEVICE FOR MONITORING FILM THICKNESS DURING DEPOSITION BY SPUTTERING

Bibliographische Detailangaben

Hauptverfasser:	ERIS IVAN ,SU, KAPLICHNYJ VILEN N,SU, BARZILOVICH YURIJ P,SU, KOROTKORUCHKO NIKOLAJ ,SU, YAREMENKO VLADISLAV M,SU, KOSTROMENKO VIKTOR L,SU, PLASTYUK ALEKSANDR ,SU
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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