INTEGRAL SEMICONDUCTOR PRESSURE TRANSDUCER AND PROCESS OF ITS MANUFACTURE

FIELD: measurement technology. SUBSTANCE: profiled membrane of converter is formed by flat plate 1 and frame 2 produced from identical monocrystalline material with matching of their equivalent crystallographic directions. Plate 1 and frame 2 can be attached by different methods: diffusion welding i...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Papkov V.S, Smyslov I.I, Surovikov M.V, Evdokimov V.I
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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