PLANT FOR MANUFACTURE OF MULTILAYER SEMICONDUCTOR HETEROEPITAXIAL STRUCTURES BY LIQUID EPITAXY PROCESS

Bibliographische Detailangaben

Hauptverfasser:	ZHURAVKEVICH EVGENIJ V,SU, GARBUZOV DMITRIJ Z,SU, ARSENTEV IVAN N,SU, VASILEV ALEKSANDR V,SU
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PHYSICS REGULATING SEMICONDUCTOR DEVICES SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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