LIGHT-SENSITIVE COMPOUNDS IN VACUUM PHOTOLITHOGRAPHIC PROCESSES

FIELD: organic chemistry. SUBSTANCE: product: 1-benzylthio-1-piperidino-1-nitro-3,4,4-trichloro-1,3-butadiene used as a light-sensitive compound in vacuum photolithographic processes. Proposed compound provides improved etching selectivity (by 2.4- fold) without backing thermostatic control (in the...

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Bibliographische Detailangaben
Hauptverfasser:	Azarko V.A, Potkin V.I, Agabekov V.E, Gudimenko Ju.I, Kaberdin R.V, Mitskevich N.I, Ol'dekop Ju.A
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	AUXILIARY PROCESSES IN PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR,STEREO-PHOTOGRAPHIC PROCESSES PHOTOGRAPHY PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES PHYSICS
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Beschreibung
Zusammenfassung:	FIELD: organic chemistry. SUBSTANCE: product: 1-benzylthio-1-piperidino-1-nitro-3,4,4-trichloro-1,3-butadiene used as a light-sensitive compound in vacuum photolithographic processes. Proposed compound provides improved etching selectivity (by 2.4- fold) without backing thermostatic control (in the known case at cooling up to -70 C). Also, organic films were removed from backing completely. EFFECT: enhanced selectivity of etching. Изобретение касается применения 1-бензилтио-1-пиперидино-2-нитро-3, 4,4-трихлор-1,3-бутадиена - светочувствительного соединения в вакуумных фотолитографических процессах, в которых достигается лучашая селективность травления (в 2,4 раза) без необходимости термтсатирования подложки (в известном случае ведут охладдение до -70C. Кроме того, органические пленки удаляются с подложки полностью.