METHOD OF DECREASING DEFECTIVENESS OF DOUBLE-LAYER DIELECTRIC IN CONDUCTOR-SILICON NITRIDE-SILICON OXIDE- SEMICONDUCTOR STRUCTURE
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| creator | Mal'tsev A.I Chernyshev Ju.R Miloshevskij V.A Tjul'kin V.M Nagin A.P |
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| language | eng ; rus |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | METHOD OF DECREASING DEFECTIVENESS OF DOUBLE-LAYER DIELECTRIC IN CONDUCTOR-SILICON NITRIDE-SILICON OXIDE- SEMICONDUCTOR STRUCTURE |
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