EDGE BEAD REMOVER

PURPOSE: Provided is an edge bead remover having an excellent resist dissolution rate, low toxicity and very high safety, excellent also in environmental preservation giving out little unpleasant odor, having a relatively high boiling point and good operability, forming no residue or deposit and cap...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	TETSUO AOYAMA, GENKI NOGAMI
Format:	Patent
Sprache:	eng
Schlagworte:	ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CANDLES CHEMISTRY CINEMATOGRAPHY DETERGENT COMPOSITIONS DETERGENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY FATTY ACIDS THEREFROM HOLOGRAPHY MATERIALS THEREFOR METALLURGY ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS RECOVERY OF GLYCEROL RESIN SOAPS SEMICONDUCTOR DEVICES SOAP OR SOAP-MAKING USE OF SINGLE SUBSTANCES AS DETERGENTS
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Beschreibung
Zusammenfassung:	PURPOSE: Provided is an edge bead remover having an excellent resist dissolution rate, low toxicity and very high safety, excellent also in environmental preservation giving out little unpleasant odor, having a relatively high boiling point and good operability, forming no residue or deposit and capable of efficiently producing a high-grade substrate for the production of electronic parts. CONSTITUTION: The edge bead remover is comprised of a mixture of methyl alpha-hydroxyisobutyrate and a compound of the following formula(I): wherein R is hydrogen or acetyl radical, R1 is hydrogen or methyl radical, R2 is alkyl having 1-4 carbons, and n is an integer of 0-3, provided that n is an integer of 1-3, when R is hydrogen. The ratio by weight of methyl alpha-hydroxyisobutyrate to the compound of formula(I) is 9:1-1:9. The compound is preferably glycol monoalkylether. The remover is used to remove an unnecessary resist composition attached to substrate.