Selective etchiing of silicate

A silicate glass is selectively etched employing a composition containing a fluoride containing compound and certain organic solvents. Preferred compositions also include water.

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Bibliographische Detailangaben
Hauptverfasser: MADDEN, KAREN, P, RATH, DAVID, L, POPE, KEITH, R, OKORN-SCHMIDT, HARALD, F, JAGANNATHAN RANGARAJAN, MCCULLOUGH, KENNETH, J
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A silicate glass is selectively etched employing a composition containing a fluoride containing compound and certain organic solvents. Preferred compositions also include water.