Electronic component method for making and target therefor

PROBLEM TO BE SOLVED: To realize a high dielectric constant, a low leak current density and a Curie temperature lower than the operating temperature of an electronic structure by providing a dielectric material layer consisting of barium titanate containing tin on the electronic structure. SOLUTION:...

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Bibliographische Detailangaben
Hauptverfasser: BAUMERT, BETH, A, TSE-LUN TSAI, SLI-HSIN CHANG
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To realize a high dielectric constant, a low leak current density and a Curie temperature lower than the operating temperature of an electronic structure by providing a dielectric material layer consisting of barium titanate containing tin on the electronic structure. SOLUTION: In an electronic structure 40 for capacitor, a dielectric material layer 43 nipped between conductive plates 42, 44 on a substrate 41 such as semiconductor preferably consists of Ba[Ti(1-x) Snx ]O3 (0