Device for handling wafer-shaped objects in a handling plane of a local clean room

In a device for handling wafer-shaped objects in a handling plane of a local clean room, the aim is to ensure the process stages preceding and succeeding the processing and inspection of the wafer-shaped objects in the conditions of a local clean room using SMIF boxes. According to the invention, th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SCHULTZ KLAUS, GAGLIN AXEL, LAHNE BERNDT
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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