Device for handling wafer-shaped objects in a handling plane of a local clean room

In a device for handling wafer-shaped objects in a handling plane of a local clean room, the aim is to ensure the process stages preceding and succeeding the processing and inspection of the wafer-shaped objects in the conditions of a local clean room using SMIF boxes. According to the invention, the structure of the handling plane (H-H) is in a fixed relationship to a reference plane (E-E) of at least one magazine-indexing device (42) comprising the magazine feed (33) according to their magazine compartments (43) and the wafer-shaped objects therein and is arranged above an intermediate floor (9) which divides the clean room into two superimposed parts (10, 11) in which one component of an airstream from the part (10) above the intermediate floor (9) is directed into the part (11) beneath the intermediate floor (9). The invention is applicable in the manufacture of integrated circuits, especially for handling purposes.