Arrangement for handling wafer-shaped objects

The arrangement has at least one transport device for transporting the objects in a manipulation plane between a preparation and acceptance site to a processing station arranged, in common with a further processing station, coaxially wrt. a centre forming the rotation axis of a central axle of a cha...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SCHULTZ KLAUS, BECKERT HARALD, LAHNE BERNDT, HEINZE MANFRED
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	The arrangement has at least one transport device for transporting the objects in a manipulation plane between a preparation and acceptance site to a processing station arranged, in common with a further processing station, coaxially wrt. a centre forming the rotation axis of a central axle of a changeover device. The central axle of the changeover device (11)is enclosed by a fixed toothed rod (56) which is engaged in at least one desired position by the gripping elements (57,58) of a parallel gripping device (59) for reproducible positioning of the changing arms (16-18) of the changeover device. The gripping elements are in the form of toothed rod sections (54,55).