CLEANING LEAD-FRAMES TO IMPROVE WIREBONDING PROCESS

A method of processing a semiconductor substrate to remove undesired material therefrom or to prepare a surface of the semiconductor substrate for subsequent bonding wherein the substrate comprises a leadframe comprising dies, bond pads, contacts, and wires, the method comprises the step of contacti...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: RAMAMURTHI, RAJKUMAR, PARRIS, GENE EVERAD, COLLIER, TERENCE QUINTIN, RENNIE, DAVID BARRY
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method of processing a semiconductor substrate to remove undesired material therefrom or to prepare a surface of the semiconductor substrate for subsequent bonding wherein the substrate comprises a leadframe comprising dies, bond pads, contacts, and wires, the method comprises the step of contacting the substrate with a liquid cleaning composition and compositions useful in the method.