CLEANING APPARATUS

5 A cleaning apparatus is provided which can prevent dust from beingdispersed into the surrounding area. The cleaning apparatus comprises a cover member which covers the cleaning target location of the article support platform, a blower which moves air toward the cleaning target location within an a...

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Bibliographische Detailangaben
1. Verfasser:	TATSUO NAKAO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	5 A cleaning apparatus is provided which can prevent dust from beingdispersed into the surrounding area. The cleaning apparatus comprises a cover member which covers the cleaning target location of the article support platform, a blower which moves air toward the cleaning target location within an area surrounded by the cover member, and a dust collector which10 collects dust that is lifted by movement of air caused by the blower.Wig. 51