SURFACE INSPECTION METHOD AND SURFACE INSPECTION APPARATUS

SURFACE INSPECTION METHOD AND SURFACE INSPECTION APPARATUSA surface inspection method for inspecting a surface H of an inspection subject having a specular surface H, including: a step in which the surface H of the inspection subject is irradiated with light L from an oblique direction; a step in which measurement is conducted of the intensity of diffracted light D that is diffracted by adhering foreignmatter K among light that is regularly reflected by the surface H of the inspection subject; a step in which measurement is conducted of the intensity of scattered light S that is irregularly reflected by the adhering foreign matter K; and a step in which an adhering condition of foreign matter K on the surface H of the inspection subject is determined based on measurement results for the intensity of the diffracted light D that isregularly reflected, and the intensity of the scattered light S that is irregularly reflected.FIG. 2