LUBRICANT COMPOSITION FOR POLISHING GLASS SUBSTRATES AND POLISHING SLURRY
OF THE DISCLOSUREA lubricant composition and polishing slurry for polishing glass substrate comprising components (A), (B) and optionally (C)5 and/or (D).(A) a cyclic oligosaccharide,water,an alkanolamine,an aliphatic carboxylic acid having 6 to 24 carbon atoms
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | OF THE DISCLOSUREA lubricant composition and polishing slurry for polishing glass substrate comprising components (A), (B) and optionally (C)5 and/or (D).(A) a cyclic oligosaccharide,water,an alkanolamine,an aliphatic carboxylic acid having 6 to 24 carbon atoms |
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