CLEANING LIQUID AND CLEANING METHOD
An object of the invention is to provide a cleaning liquid with which cerium oxide deposited on the surface of the object to be cleaned can be dissolved to form cerium ions and thus cleaned and removed, and to provide a cleaning method using such a cleaning liquid. A cleaning liquid for removing cer...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | An object of the invention is to provide a cleaning liquid with which cerium oxide deposited on the surface of the object to be cleaned can be dissolved to form cerium ions and thus cleaned and removed, and to provide a cleaning method using such a cleaning liquid. A cleaning liquid for removing cerium oxide remaining on a surface ofan object to be cleaned contains (1) hydrogen fluoride and(2) at least one ammonium salt selected from the group consisting of ammonium chloride, ammonium nitrate, ammonium sulfate, tetramethylammonium chloride, tetramethylammonium nitrate, and tetramethylammonium sulfate.No Suitable Figure |
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