A SWITCHING DEVICE AND A METHOD FOR FORMING A SWITCHING DEVICE

A SWITCHING DEVICE AND A METHOD FOR FORMING A SWITCHING DEVICE AbstractEmbodiments provide a switching device. The switching device includes a substrate which includes a contact region. The switching device further includes a vertical layer arrangement extending from the substrate next to the contac...

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Hauptverfasser:	NG JIAQIANG ELDWIN, TSAI MING LIN JULIUS, SHEN NANSHENG, NAVAB SINGH
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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Zusammenfassung:	A SWITCHING DEVICE AND A METHOD FOR FORMING A SWITCHING DEVICE AbstractEmbodiments provide a switching device. The switching device includes a substrate which includes a contact region. The switching device further includes a vertical layer arrangement extending from the substrate next to the contact region. The vertical layer arrangement includes a control layer. The switching device further includes a freestanding silicon cantilever extending vertically from the contact region.FIG. 2 (a)