CLEANING LIQUID AND CLEANING METHOD
TITLE OF INVENTION: CLEANING LIQUID AND CLEANING METHODDisclosed is a cleaning liquid which is capable of cleaning an object to be cleaned, to the surface of which5 cerium oxide adheres, by dissolving and removing cerium oxide in the form of cerium ions. A cleaning method using the cleaning liquid i...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | TITLE OF INVENTION: CLEANING LIQUID AND CLEANING METHODDisclosed is a cleaning liquid which is capable of cleaning an object to be cleaned, to the surface of which5 cerium oxide adheres, by dissolving and removing cerium oxide in the form of cerium ions. A cleaning method using the cleaning liquid is also disclosed. The cleaning liquid for removing cerium oxide is characterized by containing hydrogen fluoride, at least one acid selected from the10 group consisting of hydrochloric acid, nitric acid, sulfuric acid, acetic acid, phosphoric acid, iodic acid and hydrobromic acid, and water. The cleaning liquid is also characterized by dissolving and removing cerium oxide in the form of cerium ions. |
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