AVOIDING ELECTRICAL SHORTS IN PACKAGING

AVOIDING ELECTRICAL SHORTS IN PACKAGING

A plasma clean tool that includes a cleaning chamber for cleaning an article by plasma cleaning and a charge shield for surrounding an article to be cleaned is presented. The charge shield prevents charged components of plasma from passing therethrough to charge the article during plasma cleaning of...

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Bibliographische Detailangaben
Hauptverfasser: ALCALA DEBBIE TUERCA, MANALAC RODEL, TI-IN MICHAEL, SIAT JIMMY, ENG KIAN TENG, KWEE HENDRI YANTO
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CLEANING
CLEANING IN GENERAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
SEMICONDUCTOR DEVICES
TRANSPORTING
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Beschreibung
Zusammenfassung:A plasma clean tool that includes a cleaning chamber for cleaning an article by plasma cleaning and a charge shield for surrounding an article to be cleaned is presented. The charge shield prevents charged components of plasma from passing therethrough to charge the article during plasma cleaning of the article. Fig. 4(a)