ELECTROPOLISHING AND/OR ELECTROPLATING APPARATUS AND METHODS

An apparatus for electropolishing and/or electroplating a conductive film on a wafer includes various processing modules such as cleaning modules, processing modules, alignment modules as well as various apparatus for carrying out the processes of the difference modules such as robotics, end effecto...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VAN KERKWYK, MARK, JACOBUS, KOEHLER, DAMON, L, NGUYEN, MY, HOANG, GUTMAN, FELIX, AFNAN, MUHAMMED, YIH, PEIHAUR, HO, FREDERICK, WANG, HUI, NUCH, VOHA, CHOKSHI, HIMANSHU, J, CHANG, RU, KAO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROMOBJECTS SEMICONDUCTOR DEVICES
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