TREATING AGENT MATERIALS

TREATING AGENT MATERIALS A treating agent composition for increasing the hydrophobicity of an organosilicate glass dielectric film when applied to said film. It includes a component capable of alkylating or arylating silanol moieties of the organosilicate glass dielectric film via silylation, and an...

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Hauptverfasser: LEUNG, ROGER, Y, BHANAP, ANIL, S, MUNOZ, BETH, C, RAMOS, TERESA, A, DANIELS, BRIAN, J, ENDISCH, DENIS, H, NAMAN, ANANTH, KOROLEV, BORIS, A, IWAMOTO, NANCY, ROTH, ROBERT, R, APEN, PAUL, G
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Sprache:eng
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Zusammenfassung:TREATING AGENT MATERIALS A treating agent composition for increasing the hydrophobicity of an organosilicate glass dielectric film when applied to said film. It includes a component capable of alkylating or arylating silanol moieties of the organosilicate glass dielectric film via silylation, and an activating agent which may be an acid, a base, an onium compound, a dehydrating agent, and combinations thereof, and an optional solvent or mixture of a main solvent and a co-solvent.