DIAPHRAGM VALVE
To provide a control valve with excellent durability performance without being restricted in terms of applications, such as usages under high pressures or high temperatures, as well as reduced generation of particles. A valve body forming an inflow passage and an outflow passage of a fluid; a valve...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | To provide a control valve with excellent durability performance without being restricted in terms of applications, such as usages under high pressures or high temperatures, as well as reduced generation of particles. A valve body forming an inflow passage and an outflow passage of a fluid; a valve seat formed at a peripheral edge of the inflow passage in the valve body; a diaphragm configured to connect and shut off the inflow passage and the outflow passage by coming into and out of contact with the valve seat; a diaphragm holder configured to press a central portion of the diaphragm; and an actuator configured to move the diaphragm holder are provided, includes a regulation mechanism configured to adjust a closing pressure generated between the valve seat and the diaphragm to a predetermined pressure. |
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