POLISHING COMPOSITION
Provided is a polishing composition capable of suppressing swelling in a peripheral part of a laser mark without lowering the polishing rate thereof. The polishing composition contains water, abrasive grains, a basic compound, a benzyltrimethylammonium salt (BTMAC), and a water-soluble polymer (PVP-...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Provided is a polishing composition capable of suppressing swelling in a peripheral part of a laser mark without lowering the polishing rate thereof. The polishing composition contains water, abrasive grains, a basic compound, a benzyltrimethylammonium salt (BTMAC), and a water-soluble polymer (PVP-PVA) containing nitrogen. |
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