POLISHING COMPOSITION

Provided is a polishing composition capable of suppressing swelling in a peripheral part of a laser mark without lowering the polishing rate thereof. The polishing composition contains water, abrasive grains, a basic compound, a benzyltrimethylammonium salt (BTMAC), and a water-soluble polymer (PVP-...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: YAMASAKI, Tomoki
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Provided is a polishing composition capable of suppressing swelling in a peripheral part of a laser mark without lowering the polishing rate thereof. The polishing composition contains water, abrasive grains, a basic compound, a benzyltrimethylammonium salt (BTMAC), and a water-soluble polymer (PVP-PVA) containing nitrogen.