ADHESIVE-LESS SUBSTRATE BONDING TO CARRIER PLATE

ADHESIVE-LESS SUBSTRATE BONDING TO CARRIER PLATE

Methods for bonding and de-bonding a thin substrate film to a carrier plate are provided herein. In some embodiments, a method of processing a semiconductor substrate includes applying a polymer layer that is non-adhesive to a carrier plate formed of a dielectric material. A second layer is then app...

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Bibliographische Detailangaben
Hauptverfasser: PARATHITHASAN, Karrthik, ARUNAKIRI, Manorajh, PENG, Qi Jie, SUNDARRAJAN, Arvind, THIRUNAVUKARASU, Sriskantharajah
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:Methods for bonding and de-bonding a thin substrate film to a carrier plate are provided herein. In some embodiments, a method of processing a semiconductor substrate includes applying a polymer layer that is non-adhesive to a carrier plate formed of a dielectric material. A second layer is then applied to the polymer layer. One or more redistribution layers are then formed on the second layer. The second layer is then separated from the carrier plate via at least one of magnetic induction heating, infrared exposure, or electrostatic repulsion.