METHODS AND APPARATUS FOR MICROWAVE LEAKAGE REDUCTION FOR SEMICONDUCTOR PROCESS CHAMBERS

METHODS AND APPARATUS FOR MICROWAVE LEAKAGE REDUCTION FOR SEMICONDUCTOR PROCESS CHAMBERS

Methods and apparatus for reducing leakage of microwaves at a slit valve of a process chamber. A multi-frequency resonant choke around the slit valve prevents microwave energy from a band of frequencies from escaping from the slit valve. The multi-frequency resonant choke may have a sloping bottom s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: RAO, Preetham P, JUPUDI, Ananthkrishna, GAUTAM, Ribhu
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:Methods and apparatus for reducing leakage of microwaves at a slit valve of a process chamber. A multi-frequency resonant choke around the slit valve prevents microwave energy from a band of frequencies from escaping from the slit valve. The multi-frequency resonant choke may have a sloping bottom surface or a serrated bottom surface to enable multiple frequencies to resonant in the choke, canceling a range of microwave frequencies at gaps formed by a slit valve gate.