VACUUM PUMP SYSTEM

A vacuum pump system having at least two chambers which are arranged in series. A turbomolecular pump is connected to the second or final chamber, and a multistage Roots pump is connected to the first chamber, wherein the outlet of the first chamber is connected to an intermediate inlet of the multi...

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Bibliographische Detailangaben
1. Verfasser:	SCHNEIDERS, Robert
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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Beschreibung
Zusammenfassung:	A vacuum pump system having at least two chambers which are arranged in series. A turbomolecular pump is connected to the second or final chamber, and a multistage Roots pump is connected to the first chamber, wherein the outlet of the first chamber is connected to an intermediate inlet of the multistage vacuum pump, and an outlet of the turbomolecular pump is connected to a main inlet of the multistage vacuum pump.