SHOWERHEAD TILT MECHANISM

A showerhead tilt adjustment mechanism is provided which supports a showerhead module in a top plate of a semiconductor substrate processing apparatus, the showerhead tilt adjustment mechanism including a differential screw which provides coarse and fine adjustments to adjust gap/tilt/planarization...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KAMP, David, LUO, Bin, THOMAS, Timothy Scott, SLEVIN, Damien
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A showerhead tilt adjustment mechanism is provided which supports a showerhead module in a top plate of a semiconductor substrate processing apparatus, the showerhead tilt adjustment mechanism including a differential screw which provides coarse and fine adjustments to adjust gap/tilt/planarization of a faceplate of the showerhead module with respect to an upper surface of a substrate pedestal module adjacent the faceplate in the semiconductor substrate processing apparatus.