LASER ABLATIVE DIELECTRIC MATERIAL

Dielectric materials with optimal mechanical properties for use in laser ablation patterning are proposed. These materials include a polymer selected from the group consisting of polyureas, polyurethane, and polyacylhydrazones. New methods to prepare suitable polyacylhydrazones are also provided. Th...

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Bibliographische Detailangaben
Hauptverfasser: FLAIM, Tony D, SOUTHARD, Arthur O, MATOS-PEREZ, Cristina R, BLUMENSHINE, Deborah, KIRCHNER, Lisa M
Format: Patent
Sprache:eng
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Zusammenfassung:Dielectric materials with optimal mechanical properties for use in laser ablation patterning are proposed. These materials include a polymer selected from the group consisting of polyureas, polyurethane, and polyacylhydrazones. New methods to prepare suitable polyacylhydrazones are also provided. Those methods involve mild conditions and result in a soluble polymer that is stable at room temperature and can be incorporated into formulations that can be coated onto microelectronic substrates. The dielectric materials exhibit high elongation, low CTE, low cure temperature, and leave little to no debris post-ablation.