DUAL-LAYER ALIGNMENT DEVICE AND METHOD

A dual-layer alignment device comprises a fixing frame (); a first measurement device (50) and a marking plate (41) disposed on the fixing frame (40), wherein a fixed frame mark (20) is configured on the marking plate (41); and a movable platform (60) and a reference mark (30), a movable platform ma...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHU, Shucun, ZHOU, Xuchao, PAN, Liandong
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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