DUAL-LAYER ALIGNMENT DEVICE AND METHOD

A dual-layer alignment device comprises a fixing frame (); a first measurement device (50) and a marking plate (41) disposed on the fixing frame (40), wherein a fixed frame mark (20) is configured on the marking plate (41); and a movable platform (60) and a reference mark (30), a movable platform mark (70), and a second measurement device (10) configured on the movable platform (60). The first measurement device (50) is configured to measure a relative location relationship between the reference mark (30) and the movable platform mark (70). The second measurement device (10) is configured to measure a relative location relationship between the reference mark (30) and the fixed frame mark (20), so as to obtain a final relative location relationship between the movable platform mark (70) and the fixed frame mark (20). The movable platform (60) is moved according to the final relative location relationship to a configured location. A dual-layer alignment method is provided correspondingly. The movable platform is the only movable component in the system, and employs a static marking method to implement marking a coordinate relationship, and therefore, marking precision is unaffected by positioning precision of the movable platform (60), and consequently, alignment precision can be increased. The embodiment can employ a dual-lens or multi-lens design, providing flexible configurations and increasing the alignment precision. 15