OPTICAL ROTATION ANGLE MEASURING SYSTEM

The present invention is directed to an optical system for measuring the rotation angle of rotatable object having a rotation shaft (2), which system comprises a reflective diffraction element (6) mounted on said shaft and a module that includes a radiation source (8) emitting a monochromatic beam (...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: VAN DER KLUIT, Rinze Frederik, KIESBAUER, Bernhard, VELZEL, Christiaan H.F, PEKELDER, Sven, GUGGENMOS, Markus, HARTMANN, Martin
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention is directed to an optical system for measuring the rotation angle of rotatable object having a rotation shaft (2), which system comprises a reflective diffraction element (6) mounted on said shaft and a module that includes a radiation source (8) emitting a monochromatic beam (bo) towards this element and a radiation-sensitive detection structure (14, 16), the diffraction element is configured to project diffraction order images (18) of its pattern onto associated sections (50(1)-54(2)) of an annular grating structure forming part of the detection structure and the surface size of the diffraction element is smaller than 20% of the surface size of the annular grating structure.