GYROSCOPE DEVICES AND METHODS FOR FABRICATING GYROSCOPE DEVICES

GYROSCOPE DEVICES AND METHODS FOR FABRICATING GYROSCOPE DEVICES

According to various embodiments, there is provided a gyroscope device including: an outer frame; and four cells arranged within the outer frame, each cell of the four cells including: a proof mass arranged at least substantially in a centre region of the cell; and four electrode frames, each electr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FERNANDO, Sanchitha Nirodha, WU, Guoqiang, GU, Alex Yuandong, CHUA, Geng Li
Format: Patent
Sprache:eng
Schlagworte:
GYROSCOPIC INSTRUMENTS
MEASURING
MEASURING DISTANCES, LEVELS OR BEARINGS
NAVIGATION
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
SURVEYING
TESTING
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Beschreibung
Zusammenfassung:According to various embodiments, there is provided a gyroscope device including: an outer frame; and four cells arranged within the outer frame, each cell of the four cells including: a proof mass arranged at least substantially in a centre region of the cell; and four electrode frames, each electrode frame of the four electrode frames arranged at a corner region of the cell and coupled to a respective side of the proof mass.